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    PRODUCTS

    PRODUCTS


    ION12
    300mm Single Wafer Processor (12 Chamber)
    APOLLON
    300mm Single Wafer Processor
    VENUS
    High Temperature 300mm Single Wafer Processor
    BW Series
    300mm Batch Wafer Processor
    ATOM
    400mm Single Wafer Processor
    RHP200/150 Series
    Rapid thermal processing system used for leading edge processes for memory or logic devices
    HP/CP System
    Heat Treatment after Coating Equipment of TFT/CF Process
    Hot Air Oven System
    Thermal Process Solutions
    Pre Bake Oven
    Thermal Process Solutions
    LC Inspection System
    Appearance of Cemented Glass of ODF Line Inspection Facility
    Rubbing Steam Inspection System
    Process Status of the Glass after PI Line Rubbing Examination Facility
    ODF Gravity Mure Inspection System
    Injection Amount of Liquid Crystal of the ODF Line Inspection Facility
    6 AXIS Articulated Robot. 'ZRA'
    The Zeus 6-axis articulated robot can be used even in confined spaces and, with its high degree of freedom, can be applied to a wide range of applications.
    Horizontal Articulated Robot ‘ZRB'
    The Zeus SCARA robot minimizes the use of belts and, with its high rigidity, enables precise control.
    Parallel Robot ‘ZRC’
    The Zeus Delta robot has a lightweight design of 17 kg and boasts world-class repeatability.
    ATM Robot (Display)
    Vacuum Environment Wafer Handling Robot - SR99 series
    Vacuum Environment Wafer Handling Robot (Display)
    Vacuum Environment Wafer Handling Robot (Display)
    Electronic materials
    Various materials for use in the semiconductor, display, and MEMS industry
    ASP330 / ADP330
    Online concentration analyzer
    MB3000 / MB3600
    FTIR / FTNIR
    EL3010
    Online IPA Gas Analyzer
    Gas Analyzers
    Gas Analyzers
    Plasma and Reactive Gas Solutions
    622D / 626D Baratron® Manometer
    (Range 0.1-1000 Torr / Unheated / No Trip Point / Accuracy 0.25%)
    623H Baratron® Manometer
    (Range 10-1000 Torr / Unheated / Trip Point / Accuracy 0.25%)
    624H Baratron® Manometer
    (Range 1-1000 Torr / 45°C heated / Trip Point / Accuracy 0.12%)
    625H Baratron® Manometer
    (Range 1-1000 Torr / 100°C heated / Trip Point / Accuracy 0.25%)
    627H Baratron® Manometer
    (Range 0.02-25,000 Torr / 45°C heated / No Trip Point / Accuracy 0.12%)
    628H Baratron® Manometer
    (Range 0.05-25,000 Torr / 100°C heated / No Trip Point / Accuracy 0.25%)
    629H Baratron® Manometer
    (Range 0.02-25,000Torr / 45°C or 100°C heated / No Trip Point / Accuracy 0.12%)
    631F Baratron® Manometer
    (Range 1-1000 Torr / 150 or 200°C heated / Option Trip Point / Accuracy 0.50%)
    E27H Baratron® Manometer
    (Range 0.02-100 Torr / 45°C heated / No Trip Point / Accuracy 0.12% / Etch Sensor)
    E28H Baratron® Manometer
    (Range 0.05-100 Torr / 100°C heated / No Trip Point / Accuracy 0.25% / Etch Sensor)
    E29H Baratron® Manometer
    (Range 0.02-1000 Torr / 45°C or 100°C heated / No Trip Point / Accuracy 0.12% / Etch Sensor)
    722 / 727 / 728 Baratron® Manometer
    (Range 1-25,000 Torr / Unheated / No Trip Point / Accuracy 0.5% / Compact Sensor)
    275 Mini-Convectron® Vacuum Pressure Transducers
    (Range 1.0E-4~1000 Torr / Unheated / Option Trip Point)
    355 Micro-Ion® Hot Cathode Vacuum Pressure Transducers
    (Range 1.0E-9~5.0E-2 Torr / Unheated / Option Trip Point)
    390 Micro-Ion® ATM Modular Vacuum Pressure Transducers
    (Range 1.0E-9~1000 Torr / Unheated / Option Trip Point)
    1179C Mass Flow Controller
    (Analog / Range 10-20,000 sccm / Elastomer Sealed)
    GE50A Mass Flow Controller
    (Digital / Range 5-50,000 sccm / Elastomer Sealed)
    GM50A Mass Flow Controller
    (Digital / Range 5-50,000 sccm / Metal Sealed)
    GV50A Mass Flow Controller
    (Digital / 5- 50,000 sccm / Elastomer Sealed / Shut-off Valve)
    T2BA Exhaust Throttle Valves with Integrated
    PDR2000A Two-Channel Digital Power Supply and Readout
    PR4000B Digital Power Supply / Display for Mass Flow Controllers & Baratron® Transducers
    946 Vacuum System Controller
    307 Vacuum Gauge Controller For Use With Ionization and Convectron® Gauges
    722 Baratron® Manometer
    (Range 1-25,000 Torr / Unheated / No Trip Point / Accuracy 0.5% / Compact Sensor)
    727 / 728 Baratron® Manometer
    (Range 1-1000 Torr / 45°C, 100°C heated / No Trip Point / Accuracy 0.5% / Compact Sensor)