ION12
300mm Single Wafer Processor (12 Chamber)
- 12-chamber triple decker
- Smaller footprint / higher throughput
- Minimized cleaning chamber design
- Individual exhaust control /high purity piping
- Uniform flow control
- Individual process in each of the 6 chambers
- High performance GUI
- Efficient HMI configuration for system control
- Applications:
- Cleaning in FEOL or BEOL
- Post etch cleaning
- Pre cleaning
- Post cleaning
- Tel
- +82-31-5187-1548, +82-31-5187-1127
- E-Mail
- runjegal@globalzeus.com, kjhexit@globalzeus.com
mark@globalzeus.com (US)
