半導体 Wet Etching & Cleaning Solutions RTP(Rapid Thermal Processing) ディスプレイ Thermal Process Solutions In-Line Solutions Inspection Process Solutions ロボット ZEUS ROBOT Display 材料・部品 Materials Analyzer Gauge MFC/PC Throttle Valve Controller Etc. 6 AXIS Articulated Robot. 'ZRA' The Zeus 6-axis articulated robot can be used even in confined spaces and, with its high degree of freedom, can be applied to a wide range of applications. Horizontal Articulated Robot ‘ZRB' The Zeus SCARA robot minimizes the use of belts and, with its high rigidity, enables precise control. Parallel Robot ‘ZRC’ The Zeus Delta robot has a lightweight design of 17 kg and boasts world-class repeatability. ATM Robot (Display) Vacuum Environment Wafer Handling Robot - SR99 series Vacuum Environment Wafer Handling Robot (Display) Vacuum Environment Wafer Handling Robot (Display)
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