半導体 Wet Etching & Cleaning Solutions RTP(Rapid Thermal Processing) ディスプレイ Thermal Process Solutions In-Line Solutions Inspection Process Solutions ロボット ZEUS ROBOT Display 材料・部品 Materials Analyzer Gauge MFC/PC Throttle Valve Controller Etc. ION12 300mm Single Wafer Processor (12 Chamber) APOLLON 300mm Single Wafer Processor VENUS High Temperature 300mm Single Wafer Processor BW Series 300mm Batch Wafer Processor ATOM 400mm Single Wafer Processor RHP200/150 Series Rapid thermal processing system used for leading edge processes for memory or logic devices
