BW Series
300mm Batch Wafer Processor
- BW3000 / BW3700
- Field-proven performance
- Improved etching accuracy
- Higher throughput (up to 500WPH)
- Optimized bath design
- Applications:
- Cleaning in FEOL or BEOL
- Nitride removal
- PR strip
- Decap
- Tel
- +82-31-5187-1548, +82-31-5187-1127
- runjegal@globalzeus.com, kjhexit@globalzeus.com
mark@globalzeus.com (US)