Vacuum Environment Wafer Handling Robot (Display)
Vacuum Environment Wafer Handling Robot (Display)
- Few outgoing gas hands makes it light
- Performance steady by secured joint unit
- R and θ axis is common Unit and Maintenance is possible easily
- Done by magnetism Seal and the bellows
- Seal and the bellows whose interception of the vacuum and the atmosphere is 1 pieces, and dependable
- Controller is small and lightness and also all common and maintenance is easy
- Tel
- +82-31-5187-1045
- E-Mail
- kyongoh@globalzeus.com
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