ATM Robot (Display)
Vacuum Environment Wafer Handling Robot - SR99 series
- Modular structure arms enable flexible sizes for Gen 2 to Gen 10
- Achieved light weight and high speed maintaining stiffness of each part
- Synchronized motion of upper and lower arms
- Sankyo original alignment mechanism (Sankyo patent) reduces alignment time
- Energy saving model with lower power consumption
- Tel
- +82-31-5187-1045
- kyongoh@globalzeus.com