半導体 Wet Etching & Cleaning Solutions RTP(Rapid Thermal Processing) ディスプレイ Thermal Process Solutions In-Line Solutions Inspection Process Solutions ロボット ZEUS ROBOT Display 材料・部品 Materials Analyzer Gauge MFC/PC Throttle Valve Controller Etc. 1179C Mass Flow Controller (Analog / Range 10-20,000 sccm / Elastomer Sealed) GE50A Mass Flow Controller (Digital / Range 5-50,000 sccm / Elastomer Sealed) GM50A Mass Flow Controller (Digital / Range 5-50,000 sccm / Metal Sealed) GV50A Mass Flow Controller (Digital / 5- 50,000 sccm / Elastomer Sealed / Shut-off Valve)
