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    PRODUCTS

    Semiconductor

    Zeus manufactures and supplies equipment for the front-end process (Clean, Etch, Strip) and the back-end process (Flux, Etch, Debond), focusing on single wafer cleaning devices and batch wafer cleaning devices used in the semiconductor manufacturing cleaning process.
    Also available for memory and logic devices We supply rapid heat treatment equipment for silicon wafers.

    ION12
    300mm Single Wafer Processor (12 Chamber)
    APOLLON
    300mm Single Wafer Processor
    VENUS
    High Temperature 300mm Single Wafer Processor
    BW Series
    300mm Batch Wafer Processor
    ATOM
    400mm Single Wafer Processor
    RHP200/150 Series
    Rapid thermal processing system used for leading edge processes for memory or logic devices