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PRODUCTS
ZEUS Business Divisions
ZEUS provides Total Solutions tailored to diverse customer needs in the semiconductor, display, robot, and materials & components sectors.
- Semiconductor
We provide Single and Batch Type Wafer Cleaning systems, Front-end(Clean, Etch, Strip, RTP) and Advanced Packaging equipment, semiconductor chemicals and electronic materials.
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- Display
We develop and produce thermal processing equipment including HPCP and OVEN equipment, and offer an efficient production environment by implementing factory automation systems.
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- Robot
Based on our proprietary Joint Module technology, offering a diverse range of industrial robots and provide turnkey automation equipment and production lines.
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- Materials & Components
We supply high-purity chemical products, analyzers, and components used in semiconductors, displays, and MEMS, focusing on quality & technology.
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Starting with the manufacturing of single equipment in 2010,
we proceeded with the localization of batch equipment in 2022.
Currently, we provide equipment for the cleaning processes in semiconductor manufacturing,
ranging from the front-end process to advanced packaging and advanced package processes.
1981
SEMICONDUCTOR EQUIPMENT/ COMPONENT BUSINESS ENTRY
300mm Batch
Wafer wet processing
2000
ACQUISITION OF JAPANESE COMPANY SES SEMICONDUCTOR EQUIPMENT DIVISION ESTABLISHMENT OF JET CO., LTD. (2009)
Wet Cleaning Process
300mm Batch / Single System
Commencement of Manufacturing and Delivery
300mm Single Wafer Wet Processing
Localization (8CHB)
2010
EXPANSION OF PROCESS LINE-UP
Fab Processes : HTS(High Temperature Sulfuric),
3HF, Poly, LAL500, FPM, O3HF, etc.
PKG : Flux Clean, etc.
Transferred the listing from TPM to JPX in 2023
300mm Single Wafer
Wet Processing (12CHB)
2020
ENTRY INTO ADVANCED PACKAGING PROCESSES
Cleaner, Etcher, Stripper
ENTRY INTO RTP PROCESSES
High performance heater manufacturing
Rapid Thermal
Processing System
ZEUS’s semiconductor equipment, proven in numerous mass production environments,
responds quickly and perfectly to meet the diverse needs of our customers.
Wide-Range Process Capability
FEOL / BEOL / PKG
Total Solution for Wet Etch
and Clean
Mass Production Proven
R&D/simulation verification capabilities
based on Single / Batch
200mm / 300mm /
Adv. PKG.
Customized equipment
LAB / OSAT / IDM
1CHB ~ 12CHB
Custom equipment production
World wide +1,400
Systems SALES
Global Value Chain through Proven Performance
Rapid Thermal
Processing [RTP]
Expanding RTP Technology Beyond Semiconductors
Semiconductor Equipment Products
-
ION12
300mm Single Wafer Processor (12 Chamber)Contact
- Tel
- +82-31-5187-1548, +82-31-5187-1127
-
runjegal@globalzeus.com, kjhexit@globalzeus.com
mark@globalzeus.com (US)
-
APOLLON
300mm Single Wafer ProcessorContact
- Tel
- +82-31-5187-1548, +82-31-5187-1127
-
runjegal@globalzeus.com, kjhexit@globalzeus.com
mark@globalzeus.com (US)
-
VENUS
High Temperature 300mm Single Wafer ProcessorContact
- Tel
- +82-31-5187-1548, +82-31-5187-1127
-
runjegal@globalzeus.com, kjhexit@globalzeus.com
mark@globalzeus.com (US)
-
BW Series
300mm Batch Wafer ProcessorContact
- Tel
- +82-31-5187-1548, +82-31-5187-1127
-
runjegal@globalzeus.com, kjhexit@globalzeus.com
mark@globalzeus.com (US)
-
ATOM
400mm Single Wafer ProcessorContact
- Tel
- +82-31-5187-1548, +82-31-5187-1127
-
runjegal@globalzeus.com, kjhexit@globalzeus.com
mark@globalzeus.com (US)
-
RHP200/150 Series
Rapid thermal processing system used for leading edge processes for memory or logic devicesContact
- Tel
- +82-31-5187-1604
-
hschoi@globalzeus.com
mark@globalzeus.com (US)