APOLLON
300mm Single Wafer Processor
- Flexible configuration (1, 2, 4, 8 chambers)
- Field-proven performance
- Reduced chemical consumption
- Uniform flow control
- Applications
- Cleaning in FEOL or BEOL
- Pre / Post cleaning
- Backside cleaning (Poly, FPM)
- PERR, etc.
- Wafer level packaging
- PR stripping
- Metal etching
- Tel
- +82-31-5187-1548, +82-31-5187-1127
- runjegal@globalzeus.com, kjhexit@globalzeus.com
mark@globalzeus.com (US)