VENUS
High Temperature 300mm Single Wafer Processor
- High temperature SPM process
- Fast PR stripping process time (≤ 30sec)
- Capable of processing wafers up to 240℃
- Less fume and less contamination
- Separate stripping and cleaning chambers
- ESG support solution – atomizer saves ≥80% of chemical compared to conventional system
- Applications
- PR strip
- Post CMP cleaning
- Post PLAD strip
- Tel
- +82-31-5187-1548, +82-31-5187-1127
- runjegal@globalzeus.com, kjhexit@globalzeus.com
mark@globalzeus.com (US)