ATOM
400mm Single Wafer Processor
- Flexible configuration (1, 2, 4, 8 chambers)
- All-in-one process (chemical, rinse and dry)
- Support warped wafers
- Applications:
- Flux cleaning
- Post saw cleaning
- Debonder cleaning
- Metal etching
- Tel
- +82-31-5187-1548, +82-31-5187-1127
- runjegal@globalzeus.com, kjhexit@globalzeus.com
mark@globalzeus.com (US)