半导体 Wet Etching & Cleaning Solutions RTP(Rapid Thermal Processing) 显示器 Thermal Process Solutions In-Line Solutions Inspection Process Solutions 机器人 ZEUS ROBOT Display Materials & Components Materials Analyzer Gauge MFC/PC Throttle Valve Controller Etc. 6 AXIS Articulated Robot. 'ZRA' The Zeus 6-axis articulated robot can be used even in confined spaces and, with its high degree of freedom, can be applied to a wide range of applications. Horizontal Articulated Robot ‘ZRB' The Zeus SCARA robot minimizes the use of belts and, with its high rigidity, enables precise control. Parallel Robot ‘ZRC’ The Zeus Delta robot has a lightweight design of 17 kg and boasts world-class repeatability.
