| |
 |
|
|
 |
 |
 |
| |
 |
|
|
|
|
| |
 |
|
|
 |
 |
|
 |
| |
 |
| |
 |
| |
 |
| - Glass ¹Ý¼Û System |
| - Baking Oven |
| - Inspection System |
| - HPCP |
| - Robot System |
| - Developer, Stripper |
| - TFT-LCD Wet Station |
|
 |
| - Helix Technology Corporation - CTI Cryo Pump |
| - Helix Technology Corporation - G.P Vacuum Gauge |
| - Ion Source |
| - Thickness Monitor |
| - E-Beam Source |
| - Plasma System(Etching, PECVD) |
| - RTP |
|
|
| |
 |
| |
 |
| - SMPS |
| - Servo Motor |
| - LED Á¶¸í |
| - Sensors/ Vision System /PLC |
| - Wafer Stocker |
| - UV°æÈ±â, Plasma¼¼Á¤Àåºñ |
|
 |
| - Toxic Gas Monitoring System |
| - Site Monitoring System (SimonNT) |
| - Solvent Gas Reclaim System |
| - Facilities Management Software & Hardware |
|
|
| |
 |
| |
 |
| 1. Wafer Fab. Process |
| - Wet Station |
| - Photo Mask Cleaning System |
| - Cassette Carry (MGV, PGV) |
| - Çö»ó¾×,½Ä°¢¾× ¹× °¢Á¾ ¼¼Á¤Á¦. |
| - XRF and Laser Thin Film Analyzer |
| - Wet Process Analyzer / FTIR |
| - Track System |
| |
| 2. Back End Process |
| - Semiconductor & Electronics Machine |
| - Die / F.F. Bonder |
| - Deflashing Machine |
|
| |
| |
| - IPA Vapor Dryer |
| - Mask Process System |
| - °¨±¤¸· Á¦°Å¾×,Æú¸®¸Ó Á¦°ÅÁ¦ |
| - Evaporation System |
| - Robot |
| - Chiller |
| |
| |
| |
| - Auto-Mold & LED Mold |
| - Mold Cleaner (Rubclean) |
| - Mold Waxing (Elastowet) |
|
|
| |
 |
| |
 |
| - CD-R In-line System |
| - CD-R In-line System |
|
|
|
| |
|